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Photonic integrated circuits
Prototyping
Surface Morphology Measurement Using Atomic Force Microscopy
Photonic Integrated Circuits
Technical Scope and Capabilities
This service provides surface morphology measurement and analysis using atomic force microscopy. It supports investigation of
- surface topography
- roughness
- spatial distribution of surface structures
- surface quality.
Core Infrastructure / Tools / Equipment
The service uses the WITec 300S multifunctional microscopy system, comprising
- atomic force microscope
- confocal microscope
- scanning near-field optical microscope.
Technical Parameters
Spatial resolution:
- approximately 10 nm in the XY plane
- approximately 1 nm along the Z axis.
Target Audience and Possible Clients
The service is relevant to organisations working with
- semiconductors
- semiconductor structures
- materials
- surfaces
- micro- and nanostructures
- semiconductor or optoelectronic devices.
Possible Restrictions
- One typical measurement takes approximately 30 minutes for a 10 × 10 micrometre squared scan area
- total service delivery time depends on number of samples and scope of investigation
- clients cannot perform measurements independently
- maximum scan area for a single measurement is 80 × 80 micrometre squared.