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Semiconductor Fabrication Processes
Target audience:Company representatives with no prior experience in semiconductor process modeling who wish to better understand the chemical and technological processes that determine the performance and quality of semiconductor devices.Course summary: This course uses the Silvaco TCAD software package via the nanoHUB cloud platform to systematically introduce students and company representatives to the fundamental semiconductor fabrication processes and their modeling principles. The course comprises ten laboratory sessions that progressively cover the stages essential to integrated circuit manufacturing: epitaxial layer growth, oxidation, impurity diffusion, ion implantation, photolithography, etching, metallization, and the application of these processes to the formation of a CMOS transistor structure. Each laboratory session provides not only theoretical knowledge but also hands-on experience through computer simulation, allowing participants to observe how the properties of semiconductor structures change depending on the chosen process parameters. Particular emphasis is placed on the CMOS transistor fabrication modeling workflow — from initial silicon wafer preparation through to the formation of the final structure and analysis of the resulting current–voltage characteristics. The course provides comprehensive knowledge of the physics and technology of integrated circuit manufacturing, develops proficiency in the use of modern computer simulation tools, and enables a deeper understanding of the technological solutions applied in the semiconductor industry. It is of exceptional value both to students seeking to acquire practical skills in micro- and nanoelectronics, and to industry specialists who wish to better understand the chemical and technological processes that govern the performance and quality of semiconductor devices
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