Nano-Scale Surface Topography Imaging by SEM

Capabilities and parameters:

• measurements and basic image post-processing
• electron acceleration 1–10 keV
• magnification up to 400k
• spatial resolution 3 nm
• image resolution up to 2k × 2k pixels
• image formats: sur, tif, png, raw
• probe current 100 fA–100 nA
• temperature 10–320 K
• sample dimensions up to 25 × 25 × 2 mm
• vacuum-safe sample required.

EBIC Imaging of Electrical Properties

Capabilities and parameters:

• electron beam induced current imaging
• measurements and basic image post-processing
• electron acceleration 1–10 keV
• spatial resolution diffusion-limited
• image resolution up to 2k × 2k pixels
• image formats: sur, tif, png, raw
• probe current 10–100 nA
• temperature 10–320 K
• sample dimensions up to 25 × 25 × 2 mm
• vacuum-safe sample required.

Hyperspectral Cathodoluminescence Imaging

Capabilities and parameters:

• hyperspectral imaging of time-integrated luminescence properties
• measurements and basic image post-processing
• electron acceleration 1–10 keV
• spatial resolution diffusion-limited
• image resolution up to 512 × 512 pixels
• file formats for single-wavelength or panchromatic maps: sur, tif, png
• file formats for hyperspectral maps: sur and video formats
• probe current 100 fA–100 nA
• temperature 10–320 K
• sample dimensions up to 25 × 25 × 2 mm
• vacuum-safe sample required
• sample luminescence efficiency moderate or better
• sample irradiation resistance moderate or better
• sample active volume depth 150 nm
• spectral range 200–900 nm
• field of view up to 300 micrometres.

Space- and Time-Integrated Cathodoluminescence Spectra

Capabilities and parameters:

• capture of space- and time-integrated cathodoluminescence spectra
• measurements and basic data processing
• electron acceleration 1–10 keV
• probe current 100 fA–100 nA
• temperature 10–320 K
• sample dimensions up to 25 × 25 × 2 mm
• vacuum-safe sample required
• sample luminescence efficiency low or better
• sample irradiation resistance low or better
• sample active volume depth 200 nm
• spectral range 200–900 nm.

Spectra- and Time-Resolved Cathodoluminescence Transients

Capabilities and parameters:

• capture of spectra- and time-resolved cathodoluminescence transients
• basic data processing including lifetime extraction
• electron acceleration 3–10 keV
• typical spatial resolution 50 nm
• typical probe current 50 pA
• temperature 10–320 K
• sample dimensions up to 25 × 25 × 2 mm
• vacuum-safe sample required
• sample luminescence efficiency low or better for spatially integrated configuration and moderate for spatially resolved configuration
• sample irradiation resistance low or better for spatially integrated configuration and moderate for spatially resolved configuration
• sample active volume depth 150 nm
• spectral range 200–900 nm
• temporal resolution 20–100 ps
• pulse repetition rate 2–80 MHz.

Spectro-Spatio-Temporal 4D Imaging of Carrier Dynamics

Capabilities and parameters:

• spectro-spatio-temporal 4D imaging of carrier dynamics by cathodoluminescence microscopy
• measurements and basic data processing
• electron acceleration 3–10 keV
• typical spatial resolution 50 nm
• image resolution up to 24 × 24 pixels, upscaled to 96 × 96 pixels
• typical probe current 50 pA
• temperature 10–320 K
• sample dimensions up to 25 × 25 × 2 mm
• vacuum-safe sample required
• sample luminescence efficiency high
• sample irradiation resistance high
• sample active volume depth 100 nm
• spectral range 200–900 nm
• temporal resolution 20–100 ps
• pulse repetition rate 2–80 MHz.

Extended Defect Density Evaluation

Capabilities and parameters:

• evaluation of dislocation and V-pit density
• cathodoluminescence–electron microscopy
• sample dimensions up to 25 × 25 × 2 mm
• vacuum-safe sample required
• sample luminescence efficiency moderate or better
• sample irradiation resistance moderate or better
• sample active volume depth 50 nm
• spectral range 200–900 nm.

Point Defect Density Estimation

Capabilities and parameters:

• estimation of point defect density using electron-optical approaches
• sample dimensions up to 25 × 25 × 2 mm
• vacuum-safe and optically clear sample required
• sample luminescence efficiency moderate or better
• sample irradiation resistance moderate or better
• sample active volume depth 50 nm
• spectral range 260–900 nm.

Material Degradation under Electron Irradiation

Capabilities and parameters:

• quantification of degradation metrics, including threshold and time
• electron acceleration 1–10 keV
• probe current 100 fA–100 nA
• temperature 10–320 K
• sample dimensions up to 25 × 25 × 2 mm
• vacuum-safe sample required
• sample active volume depth 200 nm
• spectral range 200–900 nm
• exposure step of a few seconds.

Bespoke Cathodoluminescence Data Analysis

Capabilities:

• bespoke analysis of spectro-spatio-temporal cathodoluminescence data
• Digital Surf Attomap
• bespoke Python code
• code licensing under MIT licence.

Carrier Dynamics Characterisation in Wide and Narrow Bandgap Semiconductors